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book (8)


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1992 (8)

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Surface science: an introduction
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ISBN: 075069159X 0080966969 9780750691598 Year: 1992 Publisher: Boston, Mass. Butterworth-Heinemann

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Materials interfaces : atomic-level structure and properties
Authors: ---
ISBN: 0412412705 9780412412707 Year: 1992 Publisher: London Chapman and Hall

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Advanced techniques for surface engineering
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ISBN: 0792320069 9048142148 940170631X 9780792320067 Year: 1992 Volume: 1 Publisher: Dordrecht Kluwer Academic Publishers ,

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Out of the crystal maze : chapters from the history of solid state physics
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ISBN: 019505329X 9780195053296 Year: 1992 Publisher: New York : Oxford University Press,

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The materials science of thin films.
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ISBN: 012524990X 9780125249904 Year: 1992 Publisher: Boston Academic press


Book
Handbook of ion implantation technology
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ISBN: 0444897356 9780444897350 Year: 1992 Publisher: Amsterdam North-Holland

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Ion implantation is the primary technology which is used in the semiconductor industry to introduce impurities into semiconductors to form devices and VLSI circuits. All VLSI manufacturing includes ion implantation steps. The technology has universal acceptance because of the accuracy of the number of implanted atoms, and the uniformity of the implantation across large semiconductor wafers. This book is a tutorial presentation of the physics, processes, technology and operation of ion implantation. Its purpose is to serve as a teaching manual, a source book of relevant data, and a compilation of comments from some of the world's most experienced practitioners of ion implantation. The primary problems in using ion implantation in VLSI processing are wafer cooling, dielectric charging, particulate contamination and process control. Each of these problems is addressed in a separate chapter. Each section is described from first principles in simple tutorial steps, while keeping the goal of finding answers to the most modern and complex problems in VLSI processing.

Scanning tunneling microscopy. 2 : Further applications and related scanning techniques
Authors: --- ---
ISBN: 0387543082 0387545557 0387563172 3540543082 3540545557 3540563172 3642973450 3642973434 3642973655 3642973639 3642974724 3642974708 9783540543084 9783540545552 9783540563174 Year: 1992 Volume: 20, etc. Publisher: Berlin Springer

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