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Solid state physics --- Surfaces (Technology) --- Surfaces (Physics)
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Solids --- Surfaces (Physics) --- Solides --- Surfaces (Physique) --- Physics --- Surface chemistry --- Surfaces (Technology) --- Solid state physics --- Transparent solids
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Solid state physics --- Surfaces (Technology) --- Matériaux --- Revetements protecteurs --- Surfacage --- Surface treatments --- Revêtements protecteurs. --- Traitements de surface. --- Materials. --- Protective coatings.
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Solid state physics --- History --- materiaalkennis --- Mechanical properties of solids --- sterkteleer --- Materials sciences --- vaste stof --- Vaste stoffen : fysica --- 531 --- Physics --- Solids --- History.
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Solid state physics --- Thin films. --- Thin films --- 538.97 --- Films, Thin --- Solid film --- Solid state electronics --- Solids --- Surfaces (Technology) --- Coatings --- Thick films --- Special geometry and interaction with particles and radiation --- 538.97 Special geometry and interaction with particles and radiation
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Solid state physics. --- Many-body problem. --- 538.94 --- 530.19 --- 537.61 --- 538.93 --- Quantum liquids and solids --- Fundamental functions in general. Potential. Gradient. Intensity. Capacity etc. --- Theory of magnetism --- Transport processes (except in quantum liquids and solids) --- 538.93 Transport processes (except in quantum liquids and solids) --- 537.61 Theory of magnetism --- 530.19 Fundamental functions in general. Potential. Gradient. Intensity. Capacity etc. --- 538.94 Quantum liquids and solids --- Solid state physics --- Many-body problem --- Physics --- Solids --- n-body problem --- Problem of many bodies --- Problem of n-bodies --- Mechanics, Analytic --- Fundamental functions in general. Potential. Gradient. Intensity. Capacity etc --- Many body problem
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Ion implantation is the primary technology which is used in the semiconductor industry to introduce impurities into semiconductors to form devices and VLSI circuits. All VLSI manufacturing includes ion implantation steps. The technology has universal acceptance because of the accuracy of the number of implanted atoms, and the uniformity of the implantation across large semiconductor wafers. This book is a tutorial presentation of the physics, processes, technology and operation of ion implantation. Its purpose is to serve as a teaching manual, a source book of relevant data, and a compilation of comments from some of the world's most experienced practitioners of ion implantation. The primary problems in using ion implantation in VLSI processing are wafer cooling, dielectric charging, particulate contamination and process control. Each of these problems is addressed in a separate chapter. Each section is described from first principles in simple tutorial steps, while keeping the goal of finding answers to the most modern and complex problems in VLSI processing.
Solid state physics --- Ion bombardment. --- 538.91 --- Ion bombardment --- 538.97 --- Beams, Ion --- Bombardment, Ion --- Impact, Ion --- Ion beams --- Ion impact --- Ionic bombardment --- Collisions (Nuclear physics) --- Ions --- Structures, including transitions --- Special geometry and interaction with particles and radiation --- 538.97 Special geometry and interaction with particles and radiation --- 538.91 Structures, including transitions
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Scanning tunneling microscopy --- Surface chemistry --- Surfaces (Physics) --- Microscopie à effet tunnel --- Chimie des surfaces --- Surfaces (Physique) --- Optical properties --- Propriétés optiques --- Scanning tunneling microscopy. --- Optical properties. --- 531.728 --- 537.533.35 --- -Physics --- Surfaces (Technology) --- Chemistry, Surface --- Interfaces, Chemistry of --- Surface phenomena --- Surfaces (Chemistry) --- Chemistry, Physical and theoretical --- Capillarity --- Surface energy --- Surface tension --- STM (Microscopy) --- Scanning probe microscopy --- Surface measurement using microscope --- Electron microscopy --- -Surface measurement using microscope --- 537.533.35 Electron microscopy --- 531.728 Surface measurement using microscope --- -Chemistry, Surface --- Microscopie à effet tunnel --- Propriétés optiques --- Scanning probe microscopy. --- Scanned probe microscopy --- #WSCH:MODS --- Scanning electron microscopy --- Physics --- Experimental solid state physics --- Surfaces (Physics) - Optical properties.
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